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I am trying to find some review articles on the microwave hardware used in superconducting qubit quantum computing.

So far, most papers that I found seem to be high level overviews, e.g., Multilayer microwave integrated quantum circuits for scalable quantum computing. I am more interested in specific designs and challenges of the waveguides/transmission lines, cavities, signal interconnects, etc. used as hardware together with superconducting qubits.

Could anyone provide some review articles or seminars about the specific designs of the hardware/architecture?

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Are you interested more in the on-chip aspects of microwave HW, inside the fridge or room temperature components?

In any case, this paper: Microwaves in Quantum Computing is a good overall reference, and I am guessing some of the references there can get you started on going more deeply.

If you're interested in cryogenic aspects of microwave HW (which are of course closely related), I can recommend Engineering cryogenic setups for 100-qubit scale superconducting circuit systems.

Finally, A practical guide for building superconducting quantum devices has useful discussions on both the on-chip aspects of microwave HW as well as the cryogenic considerations.

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